Cov evaporating tshuaj xws li hlau, cov tebchaw, thiab lwm yam. Muab tso rau hauv lub pob zeb los yog dai ntawm cov xov hluav taws kub li qhov evaporation, thiab cov substrates yuav tsum plated xws li hlau, ceramics, plastics, thiab lwm yam. Muab tso rau hauv pem hauv ntej ntawm lub crucible. Tom qab siv lub tshuab pumped mus rau lub tshuab nqus tsev, cov khoom siv tau los ntawm cua kub lub pob zeb. Lub atoms lossis molecules ntawm cov khoom siv evaporated yog tso rau saum npoo ntawm cov substrate hauv cov txheej txheem. Film thickness tuaj yeem los ntawm ntau pua lub suab npab rau ob peb lub microns. Lub thickness film yog txiav txim los ntawm tus nqi evaporation thiab lub sijhawm ntawm evaporation qhov chaw (los yog nyob ntawm seb tus nqi them) thiab muaj feem xyuam rau qhov kev ncua deb ntawm qhov chaw thiab cov substrate. Rau qhov chaw loj, txheej txheem substrate los yog ntau qhov chaw evaporation feem ntau siv los xyuas kom meej tias uniformity ntawm film thickness. Qhov nrug ntawm cov evaporation qhov chaw mus rau lub substrate yuav tsum yog tsawg tshaj qhov ntawm txoj kab dawb vapor molecules nyob rau hauv cov residual gas thiaj li hais tias vapor molecules tsis tsoo nrog cov roj gas residues ua rau cov tshuaj lom neeg. Qhov nruab nrab kinetic zog ntawm vapor molecules yog li 0.1-0.2 electron volts.
Cov evaporating tshuaj xws li hlau, cov tebchaw, thiab lwm yam. Muab tso rau hauv lub pob zeb los yog dai ntawm cov xov hluav taws kub li qhov evaporation, thiab cov substrates yuav tsum plated xws li hlau, ceramics, plastics, thiab lwm yam. Muab tso rau hauv pem hauv ntej ntawm lub crucible. Tom qab siv lub tshuab pumped mus rau lub tshuab nqus tsev, cov khoom siv tau los ntawm cua kub lub pob zeb. Lub atoms lossis molecules ntawm cov khoom siv evaporated yog tso rau saum npoo ntawm cov substrate hauv cov txheej txheem. Film thickness tuaj yeem los ntawm ntau pua lub suab npab rau ob peb lub microns. Lub thickness film yog txiav txim los ntawm tus nqi evaporation thiab lub sijhawm ntawm evaporation qhov chaw (los yog nyob ntawm seb tus nqi them) thiab muaj feem xyuam rau qhov kev ncua deb ntawm qhov chaw thiab cov substrate. Rau qhov chaw loj, txheej txheem substrate los yog ntau qhov chaw evaporation feem ntau siv los xyuas kom meej tias uniformity ntawm film thickness. Qhov nrug ntawm cov evaporation qhov chaw mus rau lub substrate yuav tsum yog tsawg tshaj qhov ntawm txoj kab dawb vapor molecules nyob rau hauv cov residual gas thiaj li hais tias vapor molecules tsis tsoo nrog cov roj gas residues ua rau cov tshuaj lom neeg. Qhov nruab nrab kinetic zog ntawm vapor molecules yog li 0.1-0.2 electron volts.
Muaj peb hom kev evaporation. (1) Kev Tiv Thaiv Kev Tos: Ib qho hluav taws xob xws li tungsten los yog tantalum yog siv los ua ib lub nkoj ntawv los yog ib daim av, uas yog cua sov tam sim no, rhuab saum toj los, lossis muab tso rau hauv ib qho (Ntuag 1 [Schematic Diagram of evaporation txheej khoom]]. Lub hauv paus yog siv los evaporate Cd, Pb, Ag, Al, Cu, Cr, Au, Ni thiab lwm yam ntaub ntawv. 2 Kev Tiv Thaiv Kev Tiv Thaiv Cua Kub Ntau qhov chaw: Siv cov khoom siv hluav taws xob tam sim no kom muaj cua sov thiab cov ntaub ntawv pov tseg. 3 Qhov cub hluav taws xob qhov hluav taws xob: Qhov tsim nyog rau cov ntaub ntawv uas muaj cov pa sov loj (tsis pub tsawg tshaj 2000 [618-1]), uas yog, bombarding cov khoom siv nrog cov nqaj hlau electron kom evaporate.